teknụzụ mkpuchi oghere

A na-eji teknụzụ mkpuchi mkpuchi Vacuum, nke a makwaara dị ka teknụzụ ihe nkiri dị warara, n'ọtụtụ ụlọ ọrụ dị iche iche, dị ka nchekwa nchekwa ọhụrụ na ụlọ ọrụ nri, ihe nkiri nchebe mgbochi corrosion, mmepụta mkpụrụ ndụ anyanwụ, mkpuchi ịchọ mma maka ngwa ụlọ ịsa ahụ na ọla. , ịkpọ aha ole na ole.

E kewapụrụ ahịa akụrụngwa mkpuchi agụụ na-adabere na ngwa, teknụzụ na mpaghara.N'ihe gbasara teknụzụ, a na-ekewa ahịa ahụ n'ime ntinye mmiri kemịkalụ kemịkalụ (CVD), nsị anụ ahụ (ewezuga sputtering), na sputtering.

A na-ekewa akụkụ nke ikuku anụ ahụ n'ime evaporation na ndị ọzọ (laser pulsed, arc laser, wdg).A na-atụ anya na akụkụ evaporation ga-egosi mmụba dị ukwuu na usoro iheomume nyocha n'ihi mmụba dị elu nke ụlọ ọrụ semiconductor.

N'okpuru sputtering, ahịa na-ekewa n'ime reactive sputtering, magnetron sputtering (RF magnetron sputtering, wdg (pulsed DC, HIPIMS, DC, wdg)) na ndị ọzọ (RF diodes, ion ibé, wdg).

Mpaghara nke magnetron sputtering na-agbasawanye nke ọma, na-akwalite ya site na ọnọdụ dị mma metụtara ụlọ ọrụ nrụpụta na eletrọnịkị.

N'ihe gbasara ngwa, a na-ekewa ahịa ahụ n'ime ngwa CVD, ngwa PVD na ngwa sputtering.N'okpuru ngwa PVD, a na-ekewa ahịa ahụ n'ime ngwaọrụ ahụike, microelectronics, ngwaọrụ ịkpụ, nchekwa, ike anyanwụ na ndị ọzọ.A na-atụ anya na ngalaba nchekwa ahụ ga-ahụ uto na-enye nnukwu ego n'oge nyocha n'ihi mmụba na-abawanye maka nchekwa yana mmụba nke SSDs.

Ngwa PVD ndị ọzọ gụnyere akụrụngwa ikuku, akụrụngwa ụgbọ ala, nkwakọ ngwaahịa, na ndị ọzọ.

N'okpuru ngwa sputtering, ekewala ahịa ahụ n'ime ihe nkiri magnetik, ihe mmetụta gas, metallization nke sekit microelectronic na ndị na-ebu mgbawa, ihe nkiri na-eguzogide corrosion, ihe nkiri na-eguzogide, ngwaọrụ nchekwa anya, wdg.

N'okpuru ngwa CVD, a na-ekewa ahịa ahụ n'ime polymer, integrated circuit (IC) na fotovoltaic ngwaọrụ, na metal organic frameworks (nchekwa gas, adsorption, nchekwa na ịdị ọcha, gas sensing na ala-k dielectrics, catalysis, wdg), na ndị ọzọ. .