WVCP6000 Mmiri Vapor Cryopump Cryogenic Refrigeration Systems
Nkọwa ngwaahịa
Guangzhou Xieyi Automation Technology Co., Ltd., nke e hiwere na 2011, bụ ụlọ ọrụ teknụzụ dị elu pụrụ iche na South China nke na-etinye aka na mmepe nyocha, mmepụta, nyocha teknụzụ na ọrụ maka nfuli mmiri ikuku na-ekpo ọkụ na ndị ọzọ. ultra-obere okpomọkụ akụrụngwa.
XIEYI WVCP Cryochillers na-emechi loop cryogenic refrigeration usoro na-enye 550 watts ~ 6,000 watts nke jụrụ.Enwere ike iji cryochillers ndị a weghara vepo mmiri na ihe ndị ọzọ nwere ike ime site na ịdoba ha n'elu oyi dị ka Meissner coil (cryocoil).A na-ejikwa WVCP cryochillers iji mee ka ihe dị jụụ dị ka chucks electrostatic ejiri na nhazi wafer semiconductor.
Nka nka
| Nlereanya | WVCP6000-SH | WVCP6000-DH |
| Ikike jụrụ oyi kacha (W) | 6000 | 6000 |
| Theory kacha nfuli ọsọ nke tubular oyi ọnyà (L/S) | 588000 | 588000 |
| Theory kacha ọsọ nke efere oyi ọnyà (L/S) | 882000 | 882000 |
| Oge ikpeazụ (mbar) | 2*10-8 | 2*10-8 |
| Wepu oge nke mpaghara ọnyà oyi kacha (nkeji) | <5 | <5 |
| Okpomọkụ ikuku na-agbanwe agbanwe (℃) | -20-30 | -20-30 |
| Ụdị njikwa nrụgide | Ihe mmetụta dijitalụ+Mechanical mgba ọkụ | Ihe mmetụta dijitalụ+Mechanical mgba ọkụ |
| Ọrụ nrụgide nguzozi ngwa ngwa (QRBP) | Ee | Ee |
| Ọrụ igbochi mmanụ (OBP) | Ee | Ee |
| 4G njikwa anya | Ee | Ee |
| Njirimara mgbasa ozi oyi | Pro-gburugburu | Pro-gburugburu |
| Ebe kachasị elu nke ọnyà oyi tubular(㎡) | 4 | 4 |
| Ebe kachasị elu nke ọnyà oyi efere efere(㎡) | 6 | 6 |
| Nkọwapụta nke otu ọnyà oyi (㎡) | φ16mm*80m | / |
| Nkọwapụta ọnyà oyi abụọ (㎡) | / | 2 * φ16mm * 40m |
| Gas interface | 12.7 ọla kọpa welded junction (Standard) | 12.7 ọla kọpa welded junction (Standard) |
| ParkerCPI/VCR(Nhọrọ) | ParkerCPI/VCR(Nhọrọ) | |
| Mmiri jụrụ oyi (L/min na 24 ℃) | 48 | 48 |
| Oti mkpu mmiri jụrụ oyi (℃) | 38 | 38 |
| Ụlọ elu jụrụ oyi | Ee | Ee |
| Njikọ mmiri jụrụ oyi (L/S) | G1” | G1” |
| Ike ibu kacha (kW) | 25.3 | 25.3 |
| Ike ntinye aha (HP) | 20 | 20 |
| Ọkụ ọkụ (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
| 200-230V AC 3P(L) | 200-230V AC 3P(L) | |
| Akụkụ(MM) | 935(L)*873(D)*1809(H) | 1235(L)*873(D)*1809(H) |
| Ibu(KG) | 655 | 655 |
Dee ozi gị ebe a ziga anyị ya
